@inproceedings{BorisovScheible2018, author = {Vadim Borisov and J{\"u}rgen Scheible}, title = {Lithography hotspots detection using deep learning}, booktitle = {2018 SMACD : 15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design : July 2nd-July 5th, 2018, Prague, Czech Republic}, pages = {145 -- 148}, doi = {10.1109/SMACD.2018.8434561}, year = {2018}, }