@inproceedings{BorisovScheible2018,
  author    = {Vadim Borisov and J{\"u}rgen Scheible},
  title     = {Research on data augmentation for lithography hotspot detection using deep learning},
  booktitle = {34th European Mask and Lithography Conference : 18 - 20 June 2018, Grenoble, France},
  editor    = {Uwe Behringer},
  pages     = {1 -- 6},
  year      = {2018},
}