@inproceedings{HaldSeelhorstHerzogenrathetal.2017,
  author    = {Axel Hald and Johannes Seelhorst and Pekka Herzogenrath and J{\"u}rgen Scheible and Jens Lienig},
  title     = {A new method for the analysis of movement dependent parasitics in full custom designed MEMS sensors},
  booktitle = {SMACD 2017 : 14th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design : 12th - 15th June 2017, Giardini Naxos, Taormina, Italy},
  doi       = {10.1109/SMACD.2017.7981568},
  year      = {2017},
}