@article{HaldHerzogenrathScheibleetal.2018,
  author    = {Axel Hald and Pekka Herzogenrath and J{\"u}rgen Scheible and Jens Lienig and Johannes Seelhorst and Peter Brandl},
  title     = {Full custom MEMS design: a new method for the analysis of motion-dependent parasitics},
  journal   = {Integration},
  volume    = {63},
  pages     = {362 -- 372},
  doi       = {10.1016/j.vlsi.2018.02.004},
  year        = {2018},
}