TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Hald, Axel
A1  - Herzogenrath, Pekka
A1  - Scheible, Jürgen
A1  - Lienig, Jens
A1  - Seelhorst, Johannes
A1  - Brandl, Peter
T1  - Full custom MEMS design: a new method for the analysis of motion-dependent parasitics
JF  - Integration
N2  - Due to the lack of sophisticated component libraries for microelectromechanical systems (MEMS), highly optimized MEMS sensors are currently designed using a polygon driven design flow. The advantage of this design flow is its accurate mechanical simulation, but it lacks a method for analyzing the dynamic parasitic electrostatic effects arising from the electric coupling between (stationary) wiring and structures in motion. In order to close this gap, we present a method that enables the parasitics arising from in-plane, sensor-structure motion to be extracted quasi-dynamically. With the method's structural-recognition feature we can analyze and optimize dynamic parasitic electrostatic effects.
KW  - motion-dependent parasitics
KW  - polygon-driven design
KW  - MEMS design flow
KW  - MEMS sensors
Y1  - 2018
SN  - 0167-9260
SS  - 0167-9260
U6  - https://doi.org/10.1016/j.vlsi.2018.02.004
DO  - https://doi.org/10.1016/j.vlsi.2018.02.004
VL  - 63
SP  - 362
EP  - 372
S1  - 11
PB  - Elsevier
CY  - Amsterdam
ER  -