@incollection{LienigScheible2020, author = {Jens Lienig and J{\"u}rgen Scheible}, title = {Technology know-how: from silicon to devices}, booktitle = {Fundamentals of layout design for electronic circuits}, editor = {Jens Lienig and J{\"u}rgen Scheible}, isbn = {978-3-030-39284-0}, doi = {10.1007/978-3-030-39284-0\_2}, year = {2020}, }