@article{AlKtashStefanakisEnglertetal.2021,
  author    = {Mohammad Al Ktash and Mona Stefanakis and Tim Englert and Maryam Drechsel and Jan Stiedl and Simon Green and Timo Jacob and Barbara Boldrini and Edwin Ostertag and Karsten Rebner and Marc Brecht},
  title     = {UV hyperspectral imaging as process analytical tool for the characterization of oxide layers and copper states on direct bonded copper},
  journal   = {Sensors},
  volume    = {21},
  number    = {21},
  doi       = {10.3390/s21217332},
  year        = {2021},
}