Open Access

Dieter Kern, Monika Fleischer, Marc BrechtORCiD, Helmut Schift

• Plasmonics and nanophotonics both deal with the interaction of light with structures of typically sub-wavelength size in one of more dimensions. Over the past decade or two, interest in these topics has grown significantly. This includes basic research towards detailed understanding of light-matter interaction and the manipulation of light on the nanometer scale as well as the search for applications ranging from quantum information processing, data storage, solar cells, spectroscopy and microscopy to (bio-)sensors and biomedical devices. Key enablers for this development are advanced materials and the variety of techniques to structure them with nanometer precision on the one hand, and progress in the theoretical description and numerical implementations, on the other. Besides the traditional metals Au, Ag, Al, and Cu also compounds such as refractory metal nitrides with much higher durability as well as semiconductors, dielectrics and hybrid structures have become of interest. Structuring techniques are not only aiming at the fabrication of individual elements with highest precision for detailed interaction analysis, but also at methods for large scale, low-cost nanofabrication mostly for sensor applications. In the former case, mostly electron beam lithography and focused ion beam milling are employed, while for high throughput various forms of nanoimprint and self-assembly based techniques are favored. Thin film deposition and pattern transfer techniques are mostly derived from those developed for nano-electronics, however more recently methods such as electroless plating, atomic layer deposition or etching and 3-D additive techniques are appearing. Thus, highly specialized expertise has been acquired in the different disciplines, and successful research and technology transfer will draw from this pool of knowledge.