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Immersion transmission ellipsometry (ITE) for the determination

  • The capability of the method of Immersion transmission ellipsometry (ITE) (Jung et al. Int Patent WO, 2004/109260) to not only determine three-dimensional refractive indices in anisotropic thin films (which was already possible in the past), but even their gradients along the z-direction (perpendicular to the film plane) is investigated in this paper. It is shown that the determination of orientation gradients in deep-sub-lm films becomes possible by applying ITE in combination with reflection ellipsometry. The technique is supplemented by atomic force microscopy for measuring the film thickness. For a photooriented thin film, no gradient was found, as expected. For a photo-oriented film, which was subsequently annealed in a nematic liquid crystalline phase, an order was found similar to the one applied in vertically aligned nematic displays, with a tilt angle varying along the z-direction. For fresh films, gradients were only detected for the refractive index perpendicular to the film plane, as expected.

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Metadaten
Author of HS ReutlingenJung, Carl Christoph
DOI:https://doi.org/10.1007/s00340-013-5729-2
ISSN:0946-2171
eISSN:1432-0649
Erschienen in:Applied physics B : Lasers and optics
Publisher:Springer
Place of publication:Berlin
Document Type:Journal article
Language:English
Publication year:2014
Volume:116
Issue:3
Page Number:7
First Page:533
Last Page:539
DDC classes:530 Physik
Open access?:Nein
Licence (German):License Logo  In Copyright - Urheberrechtlich geschützt