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Parasitic extraction methodology for MEMS sensors with active devices

  • Nowadays, the demand for a MEMS development/design kit (MDK) is even more in focus than ever before. In order to achieve a high quality and cost effectiveness in the development process for automotive and consumer applications, an advanced design flow for the MEMS (micro electro mechanical systems) element is urgently required. In this paper, such a development methodology and flow for parasitic extraction of active semiconductor devices is presented. The methodology considers geometrical extraction and links the electrically active pn junctions to SPICE standard library models and subsequently extracts the netlist. An example for a typical pressure sensor is presented and discussed. Finally, the results of the parasitic extraction are compared with fabricated devices in terms of accuracy and capability.

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Author of HS ReutlingenScheible, Jürgen
Erschienen in:SMACD 19 : 15-18 July, Lausanne, Switzerland : 16th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design : conference proceedings
Place of publication:Piscataway, NJ
Document Type:Conference proceeding
Publication year:2019
Tag:MEMS; electrostatic analysis; parasitic extraction; pressure sensor
Page Number:4
First Page:221
Last Page:224
DDC classes:620 Ingenieurwissenschaften und Maschinenbau
Open access?:Nein
Licence (German):License Logo  In Copyright - Urheberrechtlich geschützt