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Full custom MEMS design: a new method for the analysis of motion-dependent parasitics

  • Due to the lack of sophisticated component libraries for microelectromechanical systems (MEMS), highly optimized MEMS sensors are currently designed using a polygon driven design flow. The advantage of this design flow is its accurate mechanical simulation, but it lacks a method for analyzing the dynamic parasitic electrostatic effects arising from the electric coupling between (stationary) wiring and structures in motion. In order to close this gap, we present a method that enables the parasitics arising from in-plane, sensor-structure motion to be extracted quasi-dynamically. With the method's structural-recognition feature we can analyze and optimize dynamic parasitic electrostatic effects.

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Author of HS ReutlingenScheible, Jürgen
Erschienen in:Integration, the VLSI journal
Publisher:Elsevier Science
Place of publication:Amsterdam
Document Type:Article
Year of Publication:2018
Tag:MEMS design flow; MEMS sensors; motion-dependent parasitics; polygon-driven design
Page Number:11
First Page:362
Last Page:372
DDC classes:510 Mathematik
Open Access?:Nein