Full custom MEMS design: a new method for the analysis of motion-dependent parasitics
- Due to the lack of sophisticated component libraries for microelectromechanical systems (MEMS), highly optimized MEMS sensors are currently designed using a polygon driven design flow. The advantage of this design flow is its accurate mechanical simulation, but it lacks a method for analyzing the dynamic parasitic electrostatic effects arising from the electric coupling between (stationary) wiring and structures in motion. In order to close this gap, we present a method that enables the parasitics arising from in-plane, sensor-structure motion to be extracted quasi-dynamically. With the method's structural-recognition feature we can analyze and optimize dynamic parasitic electrostatic effects.
| Author of HS Reutlingen | Scheible, Jürgen |
|---|---|
| DOI: | https://doi.org/10.1016/j.vlsi.2018.02.004 |
| ISSN: | 0167-9260 |
| Erschienen in: | Integration, the VLSI journal |
| Publisher: | Elsevier Science |
| Place of publication: | Amsterdam |
| Document Type: | Article |
| Language: | English |
| Year of Publication: | 2018 |
| Tag: | MEMS design flow; MEMS sensors; motion-dependent parasitics; polygon-driven design |
| Volume: | 63 |
| Page Number: | 11 |
| First Page: | 362 |
| Last Page: | 372 |
| DDC classes: | 510 Mathematik |
| Open Access?: | Nein |
